Monitoring laser micromachining systems for semiconductor manufacturing

CASE STUDY

Application: laser micromachining, semiconductor manufacturing

Measurement type: Laser power monitoring

Challenges

The customer develops customized laser micromachining solutions for semiconductor manufacturing. They use short and ultra-short pulse lasers as well as UV lasers, ranging from a few watts to several tens of watts. Their applications require a high level of precision, and visual inspection is not feasible. They need to monitor laser power inside the system automatically to ensure the quality of the output, thereby minimizing defects and failed parts.

Gentec-EO’s solutions

Each collaboration begins with a discussion with their lead system designer and instrumentation specialist. For most needs, the beam dimensions and power level are well-suited for our UP series of thermal laser power detectors. These detectors can be operated by serial commands for integration into their software and can be operated remotely. They program their micromachining systems to periodically shoot into the detector and notify them as soon as the laser operates outside of its specifications.

Given that they develop customized systems and often work in enclosures, they frequently have mechanical customization requests that Gentec-EO willingly accommodates.

Results

With these solutions, they can ensure process quality and have confidence in the machines delivered to their customers. Over a decade of partnership, Gentec-EO has created 60+ customized solutions for this micromachining customer.

WE CAN HELP YOU TOO

Gentec Electro-Optics specializes in laser beam measurement and analysis. With an outstanding 50-year track record of innovation, developing and providing state-of-the-art technologies to the laser market, Gentec-EO has become The Expert of the laser beam measurement field.

Gentec-EO offers the broadest range of off-the-shelf and custom laser beam measurement solutions. Challenge us with your laser specs and system requirements and we'll come up with the measurement solution that meets your needs.

Request a free consultation with a laser beam measurement expert